JPS61199631U - - Google Patents
Info
- Publication number
- JPS61199631U JPS61199631U JP8449685U JP8449685U JPS61199631U JP S61199631 U JPS61199631 U JP S61199631U JP 8449685 U JP8449685 U JP 8449685U JP 8449685 U JP8449685 U JP 8449685U JP S61199631 U JPS61199631 U JP S61199631U
- Authority
- JP
- Japan
- Prior art keywords
- level detection
- sea level
- movable pipe
- fixed member
- detection sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims 2
- 229920005989 resin Polymers 0.000 claims 2
Landscapes
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8449685U JPS61199631U (en]) | 1985-06-04 | 1985-06-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8449685U JPS61199631U (en]) | 1985-06-04 | 1985-06-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61199631U true JPS61199631U (en]) | 1986-12-13 |
Family
ID=30634061
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8449685U Pending JPS61199631U (en]) | 1985-06-04 | 1985-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61199631U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7038174B2 (en) | 1999-01-06 | 2006-05-02 | Mattson Technology, Inc. | Heating device for heating semiconductor wafers in thermal processing chambers |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5163652A (ja) * | 1974-11-30 | 1976-06-02 | Omron Tateisi Electronics Co | Ekitaireberukenshutsusochi |
-
1985
- 1985-06-04 JP JP8449685U patent/JPS61199631U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5163652A (ja) * | 1974-11-30 | 1976-06-02 | Omron Tateisi Electronics Co | Ekitaireberukenshutsusochi |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7038174B2 (en) | 1999-01-06 | 2006-05-02 | Mattson Technology, Inc. | Heating device for heating semiconductor wafers in thermal processing chambers |
| US7608802B2 (en) | 1999-01-06 | 2009-10-27 | Mattson Technology, Inc. | Heating device for heating semiconductor wafers in thermal processing chambers |